发明名称 |
Side seal for wet lens elements |
摘要 |
A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.
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申请公布号 |
US7781029(B2) |
申请公布日期 |
2010.08.24 |
申请号 |
US20060473068 |
申请日期 |
2006.06.23 |
申请人 |
ASML HOLDING N.V. |
发明人 |
LIPSON MATTHEW;SHVETS TARAS;BRULS RICHARD |
分类号 |
B05D3/00;C09J5/00;B05D1/40;C03C17/23;C03C27/00;G02B1/10;G02B3/00;G02B5/00;G02B7/02 |
主分类号 |
B05D3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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