| 摘要 |
PROBLEM TO BE SOLVED: To convey a thin or flexible flat plate-like work in a non-contact state preventing a contact, collision or dropping of the work. SOLUTION: Suction surfaces of holding and suction devices 1 sucking and holding the work G in the non-contact state by blowing out air suspending and holding the work G are arranged at the same level, the end part of the work G held by the holding and suction devices 1 is supported, a supporting and suction device 2 advancing in accordance with advance speed of the work G while supporting the work G is provided, the hanging of the end part of the work G is prevented while the work G is advancing, and the work G is held by the holding and suction device 1. COPYRIGHT: (C)2005,JPO&NCIPI |
