| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft X ray projection aligner which can reduce mechanical vibrations or which can reduce gas discharging into a vacuum region. SOLUTION: This soft X ray projection aligner 1 synchronously rocks a reflection mirror 15 for reflecting the illumination light (a soft X ray SX of wavelength of several nm to several tens nm), and a mask M held at a mask stage 21 at an angle made by a mirror rocking mechanism 17 and a stage rocking mechanism 27, respectively, and scan exposes a pattern on the mask M on a wafer W via a projection system 30. Thus, the mechanical vibrations by the drive force of a driving unit for driving the mask stage 21 or a piping reaction, etc. is hardly generated, and the amount of gas discharged into the vacuum region in association with the operations of these parts is reduced occurs. The throughput can be improved by applying a method of a present charged particle beam exposure device, and assuring the exposure accuracy by optical system correction. COPYRIGHT: (C)2005,JPO&NCIPI
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