| 摘要 |
PROBLEM TO BE SOLVED: To provide a flange holding structure with no risk of damaging a flange even if thermal deformation occurs on a flange holders. SOLUTION: The flange 20 of a quartz process tube 2 is held via metallic packing media 21 and 22 by cooling manifolds 27 and 28. The cooling manifolds 27 and 28 are held via resin packing media 29 and 30 by a fixing plate 31 and a flange holder 32. The cooling manifolds 27 and 28, the fixing plate 31, and the flange holder 32 are cooled by a water jacket and a cooling gas, respectively, to prevent the resin packing media 29 and 30 from rising in temperature. The resin packing media 29 and 30 absorb excessive fastening force by a bolt 25, thereby preventing excessive stress from concentrating on the flange. COPYRIGHT: (C)2005,JPO&NCIPI
|
