| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a magnetic film which enables to form a magnetic film having a stable CuAuI-type regular structure. SOLUTION: A composition modulation film wherein the Fe and Pt composition is modulated in the film thickness direction is heated up under the condition including a heat-up speed region of 20K/sec or above, and thereafter, heat treatment is conducted at a specified temperature of 633K or above. The composition modulation film is formed by alternately repeating the deposition of Pt atoms which is equivalent to more than 50% and not more than 90% of the quantity necessary for forming a Pt monoatomic layer and the deposition of Fe atoms which is equivalent to more than 50% and not more than 90% of the quantity necessary for forming an Fe monoatomic layer. After a rapid heat-up heat treatment, the film has a CuAuI-type regular structure. COPYRIGHT: (C)2005,JPO&NCIPI
|
