MAGNETIC PRESSURE SENSOR

摘要

Disclosed is a magnetic pressure sensor (1) comprising a glass substrate (11) having a major surface, a first shield layer (12) formed within a recess which is provided in the major surface, a GMR element (17) formed on the first shield layer (12) through an insulting layer (13), and a silicon substrate (20) bonded onto the insulting layer (13) with a gold-tin eutectic alloy (18) and having a diaphragm (20a) which comprises a hard magnetic layer (21) on one major surface so that the hard magnetic layer faces the GMR element, while having a second shield layer (22) on the other major surface.