发明名称 ENHANCED STRENGTH QUARTZ BOAT
摘要 <p>PROBLEM TO BE SOLVED: To enhance the strength of a quartz boat at connections between quartz plates and quartz rods of the quartz boat. SOLUTION: An enhanced strength quartz boat 20 is provided with a front quartz plate 11, a rear quartz plate 12, a first pair of quartz rods 13, a second pair of quartz rods 14 and four reinforce bars 17. The first pair of quartz rods 13 is disposed longitudinally to connect the front quartz plate 11 and the rear quartz plate 12 at an upper location respectively. The second pair of quartz rods is disposed longitudinally to connect, via a first engagement connection 31, the front and rear quartz plates 11 and 13 at a lower location, respectively. Each reinforce bar 17 is disposed longitudinally to connect, via a second engagement connection 32, to one corresponding front or rear quartz plate at location below one corresponding rod of the lower pair of quartz rods respectively. A welding operation is performed on the first engagement connection 31 and the second engagement connection 32, respectively. The welding operation is further performed on a junction 40 between each reinforce bar and one corresponding rod of the second quartz rods.</p>
申请公布号 JPH1145932(A) 申请公布日期 1999.02.16
申请号 JP19970171652 申请日期 1997.06.27
申请人 WINBOND ELECTRON CORP 发明人 CHOU CHU-AN;LEE CHING-SHOU;CHENG NAI-YUAN
分类号 C03B20/00;C30B31/14;H01L21/22;H01L21/673;H01L21/683;(IPC1-7):H01L21/68 主分类号 C03B20/00
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