INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To efficiently improve a manufacturing line by detecting a failure in an early stage.SOLUTION: An inspection device includes an irradiation part, an imaging part, and a control part. The irradiation part irradiates an inspection area which is a part of an area to which an organic material is applied in a substrate to which the organic material is applied by an ink jet system and extended in a direction crossing an application direction by the ink jet system with light. The imaging part images the inspection area irradiated with the light. The control part detects the failure of the substrate on the basis of a captured image captured by the imaging part.SELECTED DRAWING: Figure 6