| 发明名称 |
NANONIMPRINT LIQUID MATERIAL, METHOD FOR MANUFACTURING NANOIMPRINT LIQUID MATERIAL, METHOD FOR MANUFACTURING CURED PRODUCT PATTERN, METHOD FOR MANUFACTURING OPTICAL COMPONENT, AND METHOD FOR MANUFACTURING CIRCUIT BOARD |
| 摘要 |
A nanoimprint liquid material in which the particle number concentration of particles having a particle diameter of 0.07 μm or more is less than 310/mL is provided. |
| 申请公布号 |
WO2016136240(A1) |
申请公布日期 |
2016.09.01 |
| 申请号 |
WO2016JP00956 |
申请日期 |
2016.02.23 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KATO, Jun;HONMA, Takeshi;ITO, Toshiki |
| 分类号 |
H01L21/027;B29C59/02 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
