DEVICE ANALYZING PDP PANEL GAS

摘要

An apparatus for analyzing PDP(Plasma Display Panel) gas is provided to measure correctly pressure and volume of a PDP by using only one analyzer. A remaining gas analyzer(110) is used for analyzing the remaining gas discharged from a process chamber used in a PDP manufacturing process. A pumping unit controls a pressure state of the remaining gas analyzer. A pressure control unit controls the pressure within a remaining gas analysis range of the remaining gas analyzer. A space unit(150) receives standard gas in order to analyze the remaining gas of the remaining gas analyzer. The pumping unit is formed with a first turbo pump and a first diaphragm pump connected with the remaining gas analyzer, and a second turbo pump and a second diaphragm pump for controlling the internal pressure of the space unit.