Verfahren zur Herstellung eines mikromechanischen Bauelements und damit hergestelltes Bauelement,申请号DE20031057421-传众专利搜索

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发明名称	Verfahren zur Herstellung eines mikromechanischen Bauelements und damit hergestelltes Bauelement
摘要
申请公布号	DE10357421(B4)	申请公布日期	2008.09.11
申请号	DE20031057421	申请日期	2003.12.03
申请人	UNIVERSITAET KASSEL	发明人	HILLMER, HARTMUT;DALEIDEN, JUERGEN;PROTT, CORNELIA;ROEMER, FRIEDHARD;IRMER, SOEREN;TARRAF, AMER;GUTERMUTH, DIETMAR;ATARO, EDWIN
分类号	B81B3/00;B81B1/00;G02B26/08	主分类号	B81B3/00
代理机构		代理人
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