| 发明名称 |
FILAMENT HOLDER FOR HOT CATHODE PECVD SOURCE |
| 摘要 |
A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end. |
| 申请公布号 |
US2016163517(A1) |
申请公布日期 |
2016.06.09 |
| 申请号 |
US201514939659 |
申请日期 |
2015.11.12 |
| 申请人 |
Seagate Technology LLC |
发明人 |
Tanaka Samuel Lewis;Platt Christopher L.;Greenberg Thomas Larson |
| 分类号 |
H01J37/32;H01K1/18 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A chemical vapor deposition source comprising:
at least one plate; first and second electrical connection posts coupled to the at least one plate; a filament having a first end and a second end, wherein the first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post; and at least one filament holder electrically insulated from the at least one plate, wherein the at least one filament holder is configured to hold a portion of the filament between the first end and the second end. |
| 地址 |
Cupertino CA US |
