| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating method capable of efficiently coating a pattern in a large area. <P>SOLUTION: In the coating method, an object to be coated is coated with a coating liquid, while the object to be coated is disposed above a nozzle discharging the coating liquid upward. The coating method includes a coating step, where the nozzle and the object to be coated are moved relative to each other in a predetermined coating direction while the coating liquid discharged from the nozzle attaches to the object to be coated; and an noncoating step, where the nozzle and the object to be coated are moved relative to each other in the coating direction, while the coating liquid detaches from the object to be coated. Two steps of the coating step and the noncoating step are repeated alternately, by using the nozzle including a plurality of slit-shaped discharge ports. <P>COPYRIGHT: (C)2011,JPO&INPIT |
