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发明名称
A FABRICATION METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0152078(B1)
申请公布日期
1998.10.01
申请号
KR19900020634
申请日期
1990.12.14
申请人
OKI ELECTRIC IND. CO.,LTD
发明人
TSUBONE, KO;UMEMURA, YOSHIO;SHIMODA, KOICHI
分类号
H01L29/73;H01L21/285;H01L21/331;H01L21/8249;H01L27/06;H01L29/732;(IPC1-7):H01L29/72
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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