| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method for realizing to control independent driving of respective electrostatic actuators in an electrostatic driving device by simply controlling a driving circuit. SOLUTION: In a method for controlling driving of the electrostatic actuators carried on a liquid droplet delivering head or the like, there exist a plurality of sets of individual electrodes 12 being fixed electrodes and vibrational plates 22 being movable electrodes supported by facing respective individual electrodes 12 at a specified distance, and the vibrational plates 22 are driven so that contact with and separation from the individual electrodes 12 are repeated by an electrostatic force generated based on the electric voltage between the individual electrodes 12 and the vibrational plates 22 by controlling feeding of electric charges to the individual electrodes 12 and/or the vibrational plates 22, and by a restoring force applied on the vibrational plates 22. In this method, setting times of at least three stages are set as the generating time of the electrostatic force, and a driving controlling circuit 40 controls feeding of the electric charge to the individual electrodes 12 and/or the vibrational plates 22 so that the generating time of the electrostatic force of each set becomes either one of the times among the setting times on every driving period. COPYRIGHT: (C)2008,JPO&INPIT |
