| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle sensor capable of inexpensively and properly detecting an amount of particles using the flow of external gas flowing outside of a sensor section.SOLUTION: A particle sensor 1 detects particles S contained in measurement target gas EG that is part of an external gas flow EF by making the flow of the measurement target gas EG pass through the inside of a sensor section 10 with the external gas flow EF. The particle sensor 1 includes: charging means C1 for attaching ions CP to at least part of the particles S in the measurement target gas EG to obtain charged particles SC; stray ion removing means T1 for removing stray ions CPF from the measurement target gas EG; current measuring means D1 for obtaining a sensor signal SG by measuring a current I corresponding to the charged particles SC carried away to the outside of the sensor section 10 by the flow of the measurement target gas EG; flow rate measuring means S1-S5 for measuring a volumetric flow rate QV of the flow of the measurement target gas EG; and correcting means S9 for correcting an amount of the particles S obtained from the sensor signal SG in accordance with the volumetric flow rate QV. |
