| 摘要 |
<p>A wafer boat is provided to prevent the deformation of connection rods and the lagging of a wafer by preventing the load of wafers from being concentrated on one out of the connection rods. A wafer boat includes a upper plate(100), a lower plate, and a support unit. The lower plate(200) is spaced apart from the upper plate. The support unit(300) is used for connecting the upper and the lower plates with each other. The support unit includes slots(342) capable of loading a plurality of wafers. The support unit is composed of front rods and one or more rear rods. The front rods are used for supporting a front edge portion of the wafer. The rear rods(320) are used for supporting a rear edge portion of the wafer.</p> |
