| 发明名称 |
Semiconductor processing |
| 摘要 |
Semiconductor processing and equipment are disclosed. The semiconductor equipment and processing provide semiconductor wafers with reduced defects.
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| 申请公布号 |
US2007084827(A1) |
申请公布日期 |
2007.04.19 |
| 申请号 |
US20060544223 |
申请日期 |
2006.10.06 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
GOELA JITENDRA S.;PICKERING MICHAEL A.;FAHEY JAMES T.;STRICKLAND MELINDA S. |
| 分类号 |
B44C1/22;C03C15/00;H01L21/461 |
主分类号 |
B44C1/22 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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