PIEZOELECTRIC ACTUATOR, MANUFACTURING METHOD THEREFOR, DROPLET DISCHARGE HEAD EQUIPPED WITH SAME, AND DROPLET DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which suppresses stress of a diaphragm formed of a thick film, and also to provide a manufacturing method therefor, a droplet discharge head equipped with the piezoelectric actuator, and a droplet discharge device.

SOLUTION: The piezoelectric actuator comprises a diaphragm 48, and a piezoelectric element 46 for displacing the diaphragm 48, wherein the diaphragm 48 is formed of a silicon oxide film 82 in which an impurity is doped. The droplet discharge head 32 comprises the piezoelectric actuator. The droplet discharge device 10 comprises the droplet discharge head 32.

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