| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that when holding an optical member by an elastic member, its surface shape is changed before and after removal and re-fitting of the optical member. <P>SOLUTION: A holding apparatus is adapted to hold a held member on a base member by holding parts provided at least three positions of the periphery of the held member. The respective holding part is provided with an elastic member coupled with the base member, a first member coupled with the elastic member and a second member coupled with the held member. The second member is held on the first member in a kinematic manner. <P>COPYRIGHT: (C)2008,JPO&INPIT |
