| 摘要 |
PROBLEM TO BE SOLVED: To provide a solar cell for improving the efficiency of power generation, and to provide a method of manufacturing the solar cell.SOLUTION: In the method for manufacturing the solar cell having an amorphous silicon unit in which a p-type layer 30, an i-type layer 32 and an n-type layer 34 are laminated, a step of forming the p-type layer 30 is used to increase a doping concentration of a p-type dopant contained in the p-type layer 30 as separated from the i-type layer 32. Specifically, it is used to continuously form a high-absorption amorphous silicon carbide layer and a low-absorption amorphous silicon carbide layer while keeping the state of plasma generation. |
