Lithographic apparatus and device manufacturing method

摘要

One or more programmable patterning means are mounted to a mounting plate via height adjustment structures that enable the flatness of the active surfaces of the patterning means to be controlled. The height adjustment structures may comprise an array of piezoelectric actuators or screws. Alternatively, the backside of the patterning means may be polished to optical flatness and bonded by crystal bonding to an optically flat surface of a rigid mounting body. <IMAGE>