发明名称 |
Phase plate for a transmission electron microscope |
摘要 |
The present invention relates to a method for cleaning a phase plate (1) for a transmission electron microscope wherein said phase plate is etched before being irradiated for the first time in the TEM, and is then held in an ultra-pure holding atmosphere until the irradiation in the TEM. |
申请公布号 |
EP2879158(B1) |
申请公布日期 |
2016.08.24 |
申请号 |
EP20140193565 |
申请日期 |
2014.11.18 |
申请人 |
FEI COMPANY |
发明人 |
KURTH, PATRICK;PATTAI, STEFFEN;WAMSER, JOERG |
分类号 |
H01J37/26 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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