发明名称 Phase plate for a transmission electron microscope
摘要 The present invention relates to a method for cleaning a phase plate (1) for a transmission electron microscope wherein said phase plate is etched before being irradiated for the first time in the TEM, and is then held in an ultra-pure holding atmosphere until the irradiation in the TEM.
申请公布号 EP2879158(B1) 申请公布日期 2016.08.24
申请号 EP20140193565 申请日期 2014.11.18
申请人 FEI COMPANY 发明人 KURTH, PATRICK;PATTAI, STEFFEN;WAMSER, JOERG
分类号 H01J37/26 主分类号 H01J37/26
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