SEMICONDUCTOR COMPONENT WITH CHARGE COMPENSATION STRUCTURE AND METHOD FOR PRODUCING THE SAME

摘要

Semiconductor component (1) with charge compensation structure (3) and method for producing the same. For that purpose, the semiconductor component (1) has a semiconductor body (4) with a drift section (5) between two electrodes (6, 7). The drift section (5) comprises drift zones of a first conductivity type forming a current path between the electrodes (6, 7) in the drift section, while charge compensation zones (11) of a complementary conductivity type narrow the current path in the drift section (5). The drift section (5) comprises for that purpose two alternating, epitaxially grown diffusion zone types (9, 10), the first drift zone type (9) having a monocrystalline semiconductor material on a monocrystalline substrate (12), and a second drift zone type (10) having a monocrystalline semiconductor material in a trench structure (13), with walls (14, 15) which have a complementary doping and form the charge compensation zones (11).