| 摘要 |
This charged particle beam device is provided with a transporting optical system for transporting charged particles as a charged particle beam in the direction of a specimen stage, said system being disposed between a charged particle source and the specimen stage. The transporting optical system has a magnetic field generation unit (402) for generating a magnetic field (403) that has a course for the charged particle beam (406) and perpendicular components, an electric field generation unit (401) for generating an electric field having a course for the charged particle beam and a vertical component, and a blocking part (408) for blocking at least some of the charged particle beam that has passed through the magnetic field generation unit and the electric field generation unit. The vertical component of the magnetic field has a magnetic field gradient, and the vertical component of the electric field applies an electrostatic force in the direction opposite that of the Lorentz force received by the charged particle beam. It is thereby possible to provide an optical system in which it is possible to adjust, including increasing, the spin polarization of primary electron rays. |
