| 摘要 |
PROBLEM TO BE SOLVED: To improve sensitivity and durability in a vibrating transducer of which diaphragm is supported by a columnar structure without upsizing. SOLUTION: The vibrating transducer has: a substrate 100; a diaphragm 123, having a center section and a plurality of arm sections extended radially from the center section to the outside; a plate 162, having an opposing section that opposes the center section and a plurality of junction sections extended radially from the opposing section to the outside; a plate support section for supporting the plate; and a plurality of columnar diaphragm support sections 102 for supporting the diaphragm with a gap to the plate. In the vibrating transducer, the arm section 123c in the circumferential direction of the diaphragm is longer in a region joined to the diaphragm support section than the shortest length between the diaphragm support section and the center section. Electrostatic capacity, which is formed by the diaphragm and the plate, is changed by vibrating the diaphragm 123 to the plate 162. COPYRIGHT: (C)2009,JPO&INPIT
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