| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder and a method for handing over a substrate capable of improving the holding property of the substrate, generating no dust, having an excellent productivity and smoothly handing over the substrate. SOLUTION: A holder 13 composed of a functional adhesive element capable of varying adhesive force by the magnitude of a voltage is arranged to at least a part of the substrate supporting surface 11a of a hand 11 for a carrying mechanism. When the substrate W is carried, the substrate W is held by the adhesive force of the functional adhesive element. When the substrate W is shifted to a stage 12, the adhesive force of the functional adhesive element is made to lose. Then, a holder 15 composed of the functional adhesive element is arranged also at the front end of lifter pin 14 capable of being projected upward from the top face of the stage 12. When the substrate W is supported by the lifter pin 14, the substrate W is held by the adhesive force of the functional adhesive element for the lifter pin 14. When the substrate W is shifted to the carrying mechanism, the adhesive force is made to lose in the functional adhesive element for the lifter pin 14. COPYRIGHT: (C)2008,JPO&INPIT
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