| 摘要 |
PROBLEM TO BE SOLVED: To accurately evaporate a necessary amount of organic material by heat to provide an organic thin film with a fine film quality. SOLUTION: In a vapor deposition apparatus, vapor generating devices 20a to 20c are connected to a discharge device 50 to supply vapor while other vapor generating devices 20a to 20c are cut off from the discharge device 50, so that vapors are not mixed together. After film formation, the vapor generating devices 20a to 20c are connected to an exhaust tank while kept cut off from the discharge device 50. The exhaust tank contains cooling means 85a to 85c, on which vapor discharged into the exhaust tank is deposited to form a deposited material 39, which is recovered and reused. COPYRIGHT: (C)2009,JPO&INPIT
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