| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of transferring a large size substrate of more than about 2 meters square from a transfer cradle to a substrate holding frame body; or provide a receiving method of the large size substrate from the substrate holding frame body; or provide a transfer cradle used for those methods.SOLUTION: A transfer cradle includes: a plurality of turning wheels rotatably arranged on an upper part to form a cradle horizontal surface by contacts of all of the turning wheels with a substrate to be placed; and lift pins which are capable of rise and fall, and arranged below the cradle horizontal surface. The transfer cradle is formed in a manner such that an opening of a substrate holding frame body can pass a circumferential region of the cradle horizontal surface. Transferring of the substrate to the substrate holding frame body is performed by supporting the substrate with the lift pins in a state where both edges of the substrate are made higher than a central region of the substrate and raising the substrate holding frame body from the under side of the transfer cradle. And in receiving of the substrate, the lift pins wait in a state where a central region is made lower and the substrate is placed on the lift pins and subsequently put into a planar state. |
