| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm type actuator enabling suppression of vibration of an operation rod.SOLUTION: A diaphragm type actuator 50 for axially operating an operation rod 51 includes: a diaphragm 53 connected to the operation rod 51 to transfer driving force to the operation rod 51; a low pressure chamber 54 located adjacent to one end side in the axial direction of the diaphragm 53; a high pressure chamber 55 located adjacent to the other end side in the axial direction of the diaphragm 53; a return spring 56 provided in the low pressure chamber 54 to energize the diaphragm 53 on the high pressure chamber 55 side; and a retainer 62 provided on a surface on the high pressure chamber 55 side of the diaphragm 53. An elastic member 66 is disposed inside the high pressure chamber 55. The elastic member 66 is arranged between the retainer 62 and a wall surface 65b facing the retainer 62 in the axial direction.SELECTED DRAWING: Figure 4 |
