| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a leakage sensing device of liquid in a tank which can suppress lowering of flow rate measurement precision by an indirectly-heated flowmeter even for the low viscosity liquid in the tank, and can exactly sense very small leakage for a long period without causing a fall in sensing precision. <P>SOLUTION: The liquid in the tank introduced from and extracted to a liquid introduction section 12 is introduced from the lower end of measuring thin tubes 13b, 13b', 13b" positioning in the flow measurement part 13. At the upper end of the measuring thin tubes, a measuring tube 17 of a liquid storage part 14 is connected. The measuring tube 17 has a larger area than the measuring thin tube. To the measuring thin tube, a flow rate sensor for measuring flow rate of liquid is provided. The flow rate sensor part includes a heater 135 and temperature sensors 133, 134. The measuring thin tube has a distance L1 of 20 mm or more and 45 mm or less from the position corresponding to the heater 135 to the upper opening. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
