| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating film depositing apparatus capable of crushing coarse coagulated powder or the like forming a factor of impairing the film growth by the etching effect or the like in the AD method, and easily increasing the rate of generation of primary particles, and having excellent film deposition rate and film deposition efficiency, and a coating film depositing method using the apparatus. SOLUTION: The coating film depositing apparatus comprises an aerosol generation device 9 for forming aerosol by diffusing particles of ceramic or the like in a gas, a vacuum chamber 3, and an aerosol jet nozzle 2 arranged in the vacuum chamber 3, and performs the film deposition by jetting aerosol onto a base material 5 from the aerosol jet nozzle 2 by the aerosol deposition method. Aerosol is jetted from the aerosol jet nozzle 2 at the angle of ejection symmetric to the perpendicular to the base material 5, and particles are collided with each other before collision with the base material 5. COPYRIGHT: (C)2008,JPO&INPIT
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