摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method in which a solar battery can be simply manufactured inexpensively. <P>SOLUTION: The manufacturing method of the solar battery includes the stages of: forming a first conductivity impurity layer and a mask layer thereupon on a main surface of a silicon substrate; coating the mask layer with a pattern of etching paste capable of etching the mask layer and first conductivity impurity layer; etching away the mask layer and first conductivity impurity layer in a region of the etching paste pattern; subjecting the silicon substrate to a heat treatment to expose a partial region of the silicon substrate; forming a second conductivity impurity layer in the exposed partial region of the silicon substrate; and removing the mask layer. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |