Multi-axle motion device e.g. robot system, for use in e.g. semiconductor industry, has suction bar forming arrangement of suction device at both ends for receiving printed circuit boards, substrates, wafers or such plate-formed articles
摘要
<p>The device (1) has a gripper with sinusoidal sequence of motions and paths (11) that are arranged on a free end of arms (3, 4) that have a multi-axle drive. Each arm is associated with a stepping drive motor that is stepping motor. Stepping motors for driving independent axles operate independent of each other and in a self-sufficient manner. A feedback is not exchanged between the stepping motors. A suction bar (40) forms an arrangement of a suction device at both ends for receiving printed circuit boards, substrates, wafers or such plate-formed articles.</p>
