发明名称 Suitably short wavelength light for laser annealing of silicon in DSA type systems
摘要 The present invention generally relates to a thermal processing apparatus and method that permits a user to index one or more preselected light sources capable of emitting one or more wavelengths to a collimator. Multiple light sources may permit a single apparatus to have the capability of emitting multiple, preselected wavelengths. The multiple light sources permit the user to utilize multiple wavelengths simultaneously to approximate“white light”. One or more of a frequency, intensity, and time of exposure may be selected for the wavelength to be emitted. Thus, the capabilities of the apparatus and method are flexible to meet the needs of the user.
申请公布号 US7947584(B2) 申请公布日期 2011.05.24
申请号 US20080142108 申请日期 2008.06.19
申请人 APPLIED MATERIALS, INC. 发明人 MOFFATT STEPHEN
分类号 H01L21/26;H01L21/42 主分类号 H01L21/26
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