| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element, a piezoelectric actuator, a droplet jetting head, and a droplet jetting device, which have high reliability. <P>SOLUTION: The piezoelectric element includes: a substrate 10; a laminate 110 including a first conductive layer 20 formed on the substrate 10, a piezoelectric layer 30 formed on the first conductive layer 20, and a second conductive layer 40 formed on the piezoelectric layer 30; a protective layer 50 formed so as to cover the substrate 10 and an upper surface and a side surface of the laminate 110; and a wiring layer 60 which is formed on the protective layer 50 and electrically connected to the second conductive layer 40 through an opening 52 formed in the protective layer 50, wherein the material of the protective layer 50 includes an organic material, and the protective layer 50 is thicker between the substrate 10 and wiring layer 60 than between the second conductive layer 40 and wiring layer 60. <P>COPYRIGHT: (C)2011,JPO&INPIT |
