| 摘要 |
PROBLEM TO BE SOLVED: To provide a transmission electron microscope which electrically performs a tilt adjustment impossible for a person or a sample tilt mechanism to control, and achieves a precise tilt adjustment. SOLUTION: An electron beam E generated and accelerated by an electron gun 1 connected to a high voltage power source is focused by a focusing lens 3 formed of condenser lenses, tilted by two stages of deflection coils of a deflection part 4, and applied to a sample 5a on a sample setting table in a sample room 5. The electron beam having passed through the sample 5a put and held on the sample setting table enters an objective lens 6. An aberration corrector 7 corrects aberration caused in the objective lens 6. COPYRIGHT: (C)2007,JPO&INPIT
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