| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plate-like gas sensor capable of improving precisions in the temperature control of a detector and in the detection of a gas to be measured. <P>SOLUTION: The gas sensor includes: a plate-like sensor element 50A having the sensing part 10A exposed to one 51A of surfaces thereof, for detecting a specific gas in the gas to be measured; a dense insulation layer 12A formed on the outermost layer of the back surface 52A opposed to the surface of the sensor element; and a temperature detecting unit 14A located just below the dense insulating layer, for detecting a temperature in the detector. The detector includes a pair of electrodes 2A and a sensitive section 4 located in contact with the pair of electrodes, which detects ammonia concentration in the gas to be measured by the variation in an the impedance between the pair of electrodes. <P>COPYRIGHT: (C)2009,JPO&INPIT |
