发明名称 Methods and apparatus for transfer of films among substrates
摘要 A method is disclosed which includes: forming at least one layer of material on at least part of a surface of a first substrate, wherein a first surface of the at least one layer of material is in contact with the first substrate thereby defining an interface; attaching a second substrate to a second surface of the at least one layer of material; forming bubbles at the interface; and applying mechanical force; whereby the second substrate and the at least one layer of material are jointly separated from the first substrate. Related arrangements are also described.
申请公布号 US9427946(B2) 申请公布日期 2016.08.30
申请号 US201414445746 申请日期 2014.07.29
申请人 GRAPHENE FRONTIERS 发明人 Willner Bruce Ira
分类号 H01L21/02;H01L21/67;B32B37/24;B32B38/08;C01B31/04 主分类号 H01L21/02
代理机构 Dentons US LLP 代理人 Dentons US LLP
主权项 1. A method comprising: forming at least one layer of material comprising graphene on at least part of a surface of a first substrate, wherein a first surface of the at least one layer of material is in contact with the first substrate thereby defining an interface; forming at least one layer of a second material on at least part of an opposing surface of the first substrate, wherein the at least one layer of the second material comprises a polymer; attaching a second substrate to a second surface of the at least one layer of material, the second surface opposing the first surface; forming bubbles at the interface; and applying mechanical force, wherein applying mechanical force comprises pulling the first substrate in a first direction, and pulling the second substrate along with the at least one layer of material in a second direction, the first and second directions diverging from one another, thereby defining an angle of separation, the angle of separation is about 1 degree to about 90 degrees; whereby the second substrate and the at least one layer of material are jointly separated from the first substrate at the interface by the bubbles formed at the interface and the application of mechanical force.
地址 Philadelphia PA US