发明名称 PACKAGE, AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a package and a manufacturing method thereof wherein its solder disposing process can be completed only by one operation. SOLUTION: In the package, an element substrate 11 is so disposed that an air gap 100 is formed between it and a sealing substrate 13. A spacer 25 has a first frame-form surface 251 joined by a solder to the sealing substrate 13, a second frame-form surface 252 joined by a solder to the element substrate 11, an inner periphery surface 253 which connects inner peripheries of frame-forms of the first and second surfaces 251, 252 with each other, and an outer periphery surface 254 having a solder wettability higher than that of the inner periphery surface 253 which connects outer peripheries of frame-forms of the first and second surfaces 251, 252 with each other. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008311429(A) 申请公布日期 2008.12.25
申请号 JP20070157805 申请日期 2007.06.14
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMASHITA AKIRA;HATA HISATOSHI;TAKEDA MUNEHISA
分类号 H01L23/02;G01J1/02 主分类号 H01L23/02
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