| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device which is equipped with a container rotating together with a material to be coated, and can maintain excellent airtightness in the container. SOLUTION: The coating device 1 is equipped with a spinner 4 and an inner cup 3. The inner cup 3 is equipped with an O-ring 33, a lid member 32, and a bottom member 31, and rotates around the spinner 4 together with a work 99 accommodated in it. The O-ring 33 is an endless material made of an elastic body material. The lid member 32 is a disc-shaped material having a peripheral wall part 322 along its peripheral edge. The peripheral wall part 322 abuts on the outer peripheral side of the O-ring 33. The bottom member 31 is a disc-shaped material having a peripheral wall part 312 along its peripheral edge. The peripheral wall part 312 abuts on the inner peripheral side of the O-ring 33. When the bottom member 31 rotates, the peripheral wall part 312 is deformed toward the outer peripheral side in a larger extent than the peripheral wall part 322 of the lid member 32. COPYRIGHT: (C)2009,JPO&INPIT
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