ULTRASONIC TRANSDUCER AND ULTRASONIC INSPECTION DEVICE

摘要

In a capacitive-detection-type ultrasonic transducer, variation in the film thickness of a membrane of each cell in a cell array of the ultrasonic transducer causes the device characteristics of cells in the cell array to be nonuniform. Provided is an ultrasonic transducer provided with a CMUT chip 301 including a cell array region CAR in which a plurality of cells are formed and a peripheral region PER adjoining the cell array region CAR, wherein a beam structure 201 is disposed in the cell array region CAR, and a plurality of pattern structures 311 corresponding to the beam structure 201 are disposed in the peripheral region PER. This reduces the difference between the unit surface area of the cell array region CAR and the unit surface area of the peripheral region PER. As a result, it is possible to improve uniformity in the film thickness of an insulating film covering the beam structure 201 and the pattern structures 311.