,申请号JP19980149045-传众专利搜索

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发明名称
摘要
申请公布号	JP3340387(B2)	申请公布日期	2002.11.05
申请号	JP19980149045	申请日期	1998.05.29
申请人		发明人
分类号	G03F7/20;H01J37/153;H01J37/302;H01J37/305;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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