发明名称 |
METHOD OF MAKING A PVD AL2O3 COATED CUTTING TOOL |
摘要 |
The present invention relates to a process for producing a coated cutting tool consisting of a coating and a substrate, wherein at least one refractory layer consisting of fine-grained, crystalline gamma-Al2O3 is deposited by reactive magnetron sputtering onto the moving substrate in a vacuum by pulsed magnetron sputtering in a mixture of a rare gas and a reactive gas at a pulse frequency set for 10 to 100 kHz. The deposition occurs with a rate of at least 1 nm/s with reference to a stationarily arranged substrate at a magnetron target power density in time average set for at least 10 W/cm2. The substrate temperature is in the range 400 to 700° C. and the flux of impinging particles onto each individual substrate is cyclically interrupted. |
申请公布号 |
PL193249(B1) |
申请公布日期 |
2007.01.31 |
申请号 |
PL20000345385 |
申请日期 |
2000.05.03 |
申请人 |
SANDVIK INTELLECTUAL PROPERTY AB;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
SCHILLER SIEGFRIED;GOEDICKE KLAUS;FIETZKE FRED;ZYWITZKI OLAF;SJOESTRAND MATS;LJUNGBERG BJOERN |
分类号 |
B23C5/16;C23C14/35;B23B27/14;C23C14/00;C23C14/08;C23C14/34;C23C30/00 |
主分类号 |
B23C5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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