Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dimensional Scanning Sensor Device

摘要

An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

主权项

1. An actuator comprising:
an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part provided with the movable electrode and driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part to enable the movable electrode to be displaced by sliding in a plane with respect to the stationary electrode; an electret formed in at least one of the stationary electrode and the movable electrode of the electrostatic actuation mechanism; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism, wherein: in the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position; and the drive control unit controls the electrostatic force generated by the electrostatic actuation mechanism by applying a voltage to the electrostatic actuation mechanism to change any one of the stable states to another of the stable states to displace the first movable part from any stable position to another stable position.