| 摘要 |
PROBLEM TO BE SOLVED: To materialize a stage mechanism capable of certainly specifying a correct position and an orientation of a stage, with a simple structure.SOLUTION: A stage mechanism 30 includes: a base 40; a stage 50 which is provided with a plurality of markers 56A-56P different from each other, and movably supported by the base 40; a stage moving device 60 which drives the stage 50; cameras 70A-70C which are provided above the stage 50 and shoot the stage 50; and a micro computer 75 which detects the markers 56A-56P from a captured image of the stage 50, and specifies a position and an orientation of the stage 50 on the basis of the detected markers 56A-56P. When the stage 50 is viewed from the cameras 70A-70C, positions of the markers 56A-56P are different according to the position and the orientation of the stage 50.SELECTED DRAWING: Figure 1 |
