| 发明名称 | Charged particle beam drawing apparatus | ||
| 摘要 | A charged particle beam drawing apparatus according to an embodiment includes; a vacuum vessel including a base plate; a stage provided in the vacuum vessel and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; and a support body supporting the detection unit. | ||
| 申请公布号 | US9466465(B2) | 申请公布日期 | 2016.10.11 |
| 申请号 | US201514674054 | 申请日期 | 2015.03.31 |
| 申请人 | NuFlare Technology, Inc. | 发明人 | Ideno Keita |
| 分类号 | H01J37/20;H01J37/317 | 主分类号 | H01J37/20 |
| 代理机构 | Oblon, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A charged particle beam drawing apparatus comprising: a vacuum vessel including a base plate; a stage provided in the vacuum vessel and supporting a sample; a stage movement mechanism provided in the vacuum vessel and moving the stage; a two-dimensional scale provided on a lower surface of the stage; a detection unit disposed under the two-dimensional scale and detecting a position of the stage by using the two-dimensional scale; a support body supporting the detection unit; an opening provided on the base plate; a lid body that is provided with the base plate and closes the opening; and a gap that communicates with an upper area and a lower area, wherein the support body is disposed between the lid body and the detection unit so as to be spaced away from the lid body. | ||
| 地址 | Yokohama JP | ||