DEVICE FOR MANUFACTURING INTEGRATED THIN FILM SOLAR CELL

摘要

An apparatus for manufacturing an integrated thin film solar cell in which a plurality of unit cells are electrically connected in series to each other in vacuum may be provided that includes: a photoelectric converter forming process chamber which forms a photoelectric converter by emitting a photoelectric conversion material on a substrate where a first conductive layer has been formed from one basic line within each of a plurality of trenches formed in the substrate to a bottom of each of the trenches, to one side continuous from the bottom, and to a protruding surface of the substrate, which is continuous from the one side; and a second conductive layer forming process chamber which forms a second conductive layer from another basic line within each of the trenches to the bottom of each of the trenches, to the other side continuous from the bottom, and to a protruding surface of the substrate, which is continuous from the other side. The photoelectric converter forming process chamber and the second conductive layer forming process chamber perform the respective processes in vacuum.

主权项

1. An apparatus for manufacturing an integrated thin film solar cell in which a plurality of unit cells are electrically connected in series to each other in vacuum, the apparatus comprising:
a photoelectric converter forming process chamber which forms a photoelectric converter by emitting a photoelectric conversion material on a substrate where a first conductive layer has been formed from one basic line within each of a plurality of trenches formed in the substrate to a bottom of each of the trenches, to one side continuous from the bottom, and to a protruding surface of the substrate, which is continuous from the one side; and a second conductive layer forming process chamber which forms a second conductive layer from another basic line within each of the trenches to the bottom of each of the trenches, to the other side continuous from the bottom, and to a protruding surface of the substrate, which is continuous from the other side,
wherein the photoelectric converter forming process chamber and the second conductive layer forming process chamber perform the respective processes in vacuum.