| 摘要 |
PROBLEM TO BE SOLVED: To provide an Al alloy target contg. eutectic structure formable elements remarkably small in defects, i.e., capable of preventing the generation of splashes. SOLUTION: This Al alloy target has a microstructure composed of Al phases and eutectic structural phases composed of Al and eutectic structure formable elements with Al. Preferably, in an Al alloy contg. Al and one or more kinds among eutectic structure formable elements with Al, it has a microstructure composed of eutectic structural phases and Al phases, and the maximum major axis of the eutectic structure is regulated to <=200μm.
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