| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method making possible to recover a value component at >=60 deg.C. SOLUTION: In the value component recovering method, the diluted waste gas is formed by diluting the waste gas with the diluent gas by using the material having higher b.p. than that of the component having the highest b.p. among the plural value components contained in the waste gas of a semiconductor production stage, and the diluent gas is recovered as liq. and also the value component is recovered as gas by keeping the temp. of the diluted waste gas lower than the b.p. of the diluent gas and higher than the b.p. of the material having the highest b.p. among the value components in the waste gas.</p> |
